Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7708618 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Hiromi Yajima, Shoichi Kodama, Riichiro Aoki, Takashi Omichi, Toyomi Nishi +1 more | 2010-05-04 |
| 7198552 | Polishing apparatus | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2007-04-03 |
| 6997782 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2006-02-14 |
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2002-12-31 |
| 5827110 | Polishing facility | Hiromi Yajima, Shoichi Kodama, Riichiro Aoki, Takashi Omichi, Toyomi Nishi +1 more | 1998-10-27 |
| 5704827 | Polishing apparatus including cloth cartridge connected to turntable | Toyomi Nishi, Manabu Tsujimura, Tamami Takahashi, Hiromi Yajima, Riichiro Aoki +4 more | 1998-01-06 |
| 5679059 | Polishing aparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 1997-10-21 |