Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7708618 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Hiromi Yajima, Yukio Imoto, Shoichi Kodama, Riichiro Aoki, Toyomi Nishi +1 more | 2010-05-04 |
| 5827110 | Polishing facility | Hiromi Yajima, Yukio Imoto, Shoichi Kodama, Riichiro Aoki, Toyomi Nishi +1 more | 1998-10-27 |