Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7198552 | Polishing apparatus | Toyomi Nishi, Tetsuji Togawa, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2007-04-03 |
| 6997782 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Toyomi Nishi, Tetsuji Togawa, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2006-02-14 |
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2002-12-31 |
| 5679059 | Polishing aparatus and method | Toyomi Nishi, Tetsuji Togawa, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 1997-10-21 |
| 5173041 | Multistage vacuum pump with interstage solid material collector and cooling coils | Yasuhiro Niimura | 1992-12-22 |
| 4452155 | Method for incinerating material | Hideo Ishihara, Takahiro Ohshita | 1984-06-05 |
| 4419330 | Thermal reactor of fluidizing bed type | Hideo Ishihara, Takahiro Ohshita | 1983-12-06 |