Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Tetsuya Yashima +5 more | 2020-06-23 |
| 9555517 | Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method | Taro Takahashi, Akira Nakamura | 2017-01-31 |
| 9144881 | Polishing apparatus and polishing method | Soichi Isobe, Seiji Katsuoka, Naoki Matsuda | 2015-09-29 |
| 8388409 | Substrate polishing apparatus | Yasumitsu Kawabata, Yoshifumi Katsumata, Naoki Ozawa, Tatsuya Sasaki, Atsushi Shigeta | 2013-03-05 |
| 8206197 | Polishing apparatus and program thereof | Masafumi Inoue, Koichi Takeda | 2012-06-26 |
| 8078306 | Polishing apparatus and polishing method | Eisaku Hayashi, Kunio Oishi, Isao Hayakawa, Yoshiaki Miyake, Yoshikuni Tateyama +1 more | 2011-12-13 |
| 8038136 | Hand having rocking mechanism and substrate delivering device having the same | Hiroki SANEMASA, Hideo Yamamoto, Naoomi Torii, Takahiro Ogawa, Seiji Katsuoka +1 more | 2011-10-18 |
| RE38215 | Polishing apparatus | Miki Shibata, Toyomi Nishi, Tetsuji Togawa | 2003-08-12 |
| 6074276 | Polishing apparatus | Miki Shibata, Toyomi Nishi, Tetsuji Togawa | 2000-06-13 |
| 5885134 | Polishing apparatus | Miki Shibata, Toyomi Nishi, Tetsuji Togawa | 1999-03-23 |