Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9573245 | Polishing method | Taro Takahashi | 2017-02-21 |
| 8388409 | Substrate polishing apparatus | Hidetaka Nakao, Yoshifumi Katsumata, Naoki Ozawa, Tatsuya Sasaki, Atsushi Shigeta | 2013-03-05 |