Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398811 | Polishing apparatus and polishing method | Tatsuya Sasaki, Naoshi Yamada, Noburu Shimizu, Seiryo Tsuno, Takashi Mitsuya | 2013-03-19 |
| 8388409 | Substrate polishing apparatus | Hidetaka Nakao, Yasumitsu Kawabata, Naoki Ozawa, Tatsuya Sasaki, Atsushi Shigeta | 2013-03-05 |
| 8025759 | Polishing apparatus and polishing method | Tatsuya Sasaki, Naoshi Yamada, Noburu Shimizu, Seiryo Tsuno, Takashi Mitsuya | 2011-09-27 |