Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869788 | Substrate processing device | Koji Maeda, Mitsuhiko Inaba, Haiyang Xu | 2024-01-09 |
| 10688622 | Substrate processing apparatus | Hiroshi Aono, Kuniaki Yamaguchi, Hiroshi Shimomoto, Koji Maeda, Kenji Shinkai +5 more | 2020-06-23 |
| 10573509 | Cleaning apparatus and substrate processing apparatus | Koji Maeda, Hiroshi Shimomoto, Kuniaki Yamaguchi, Hiroshi Aono, Hidetatsu Isokawa +6 more | 2020-02-25 |
| 7942725 | Polishing apparatus | Hiroomi Torii, Takuji Hayama | 2011-05-17 |
| 7445543 | Polishing apparatus | Hiroomi Torii, Takuji Hayama | 2008-11-04 |