Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869780 | Substrate liquid processing apparatus | Takafumi Tsuchiya, Hideaki Sato, Hidemasa Aratake, Osamu Kuroda, Takashi Nagai +1 more | 2024-01-09 |
| 11842904 | Control device and substrate processing method | Hiroshi Yoshida | 2023-12-12 |
| 11295966 | Substrate processing method and substrate processing apparatus | Hiroshi Yoshida | 2022-04-05 |
| 10985035 | Substrate liquid processing apparatus, substrate liquid processing method and computer readable recording medium having substrate liquid processing program recorded therein | Hiromi Hara, Hideaki Sato, Takashi Nagai | 2021-04-20 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Hiromi Hara, Toshiyuki Shiokawa +1 more | 2018-02-06 |