Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Hiromi Hara, Wataru Tsukinoki, Shuhei Goto | 2025-06-03 |
| 11869780 | Substrate liquid processing apparatus | Takahiro Kawazu, Hideaki Sato, Hidemasa Aratake, Osamu Kuroda, Takashi Nagai +1 more | 2024-01-09 |
| 11594430 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Yuki Ishii, Hiroyuki Masutomi, Seigo Fujitsu | 2023-02-28 |
| 10928732 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hironobu Hyakutake, Koichiro Kanzaki | 2021-02-23 |
| 10458010 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hironobu Hyakutake, Koichiro Kanzaki | 2019-10-29 |
| 9305818 | Substrate processing apparatus | Yuji Kamikawa, Koji Egashira | 2016-04-05 |
| 8851819 | Substrate processing apparatus | Yuji Kamikawa, Koji Egashira | 2014-10-07 |
| 8790469 | Treating apparatus, treating method and recording medium | Tohru Iwabae | 2014-07-29 |
| 8079797 | Substrate processing system and substrate transfer method | Osamu Tanaka, Tohru Iwabae | 2011-12-20 |