Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8790469 | Treating apparatus, treating method and recording medium | Takafumi Tsuchiya | 2014-07-29 |
| 8079797 | Substrate processing system and substrate transfer method | Osamu Tanaka, Takafumi Tsuchiya | 2011-12-20 |