Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11972958 | Substrate processing apparatus and substrate processing method | Takumi Honda | 2024-04-30 |
| 11637026 | Substrate liquid processing apparatus | Takashi Ikeda | 2023-04-25 |
| 11594430 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Takafumi Tsuchiya, Yuki Ishii, Seigo Fujitsu | 2023-02-28 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Toshiyuki Shiokawa, Koji Yamashita, Hitoshi Kosugi, Takao Inada +2 more | 2022-04-19 |
| 10483137 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Toshiyuki Shiokawa, Koji Tanaka, Takami Satoh | 2019-11-19 |