Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11433420 | Solution supply apparatus and solution supply method | Ryouichirou Naitou, Masato Hayashi, Hideo Shite, Hiroyuki Ide, Yosuke Kameda +4 more | 2022-09-06 |
| 10714365 | Liquid processing apparatus | Tetsurou Iriyama, Shinichi Umeno, Yasuhiro Takaki | 2020-07-14 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Yasuhiro Takaki, Shinichi Umeno, Koji Tanaka, Atsushi Anamoto | 2020-02-25 |
| 10483137 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hiroyuki Masutomi, Toshiyuki Shiokawa, Koji Tanaka | 2019-11-19 |
| 10276408 | Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system | Michitaka Amiya, Kazuyoshi Eshima, Akihiro Nakamura, Koji Tanaka, Kazuki Kosai | 2019-04-30 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Kazuyoshi Mizumoto, Takashi Uno +3 more | 2018-09-04 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Hiromi Hara, Takahiro Kawazu +1 more | 2018-02-06 |
| 9881799 | Substrate liquid processing apparatus, substrate liquid processing method, and computer-readable storage medium | Hideaki Sato | 2018-01-30 |
| 9631963 | Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium | Ryoji ANDO | 2017-04-25 |
| 9109934 | Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium | Ryoji ANDO | 2015-08-18 |
| 8054612 | Plug-in unit including a breaker and an electric device | Kenji Ichinomiya, Toshiyuki Kawano | 2011-11-08 |
| 5887604 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Hirofumi Shiraishi +3 more | 1999-03-30 |
| 5782990 | Method for washing objects | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Hirofumi Shiraishi +3 more | 1998-07-21 |
| 5681614 | Hydrophobic treatment method involving delivery of a liquid process agent to a process space | Tsutae Omori, Kouji Harada, Noriyuki Anai, Masafumi Nomura | 1997-10-28 |
| 5671764 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Hirofumi Shiraishi +3 more | 1997-09-30 |
| 5518552 | Method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1996-05-21 |
| 5514852 | Heat treatment device | Hideyuki Takamori | 1996-05-07 |
| 5505781 | Hydrophobic processing apparatus including a liquid delivery system | Tsutae Omori, Kouji Harada, Noriyuki Anai, Masafumi Nomura | 1996-04-09 |
| 5488964 | Washing apparatus, and washing method | Shinya Murakami, Yuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Hirofumi Shiraishi +3 more | 1996-02-06 |
| 5345639 | Device and method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1994-09-13 |