Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5518552 | Method for scrubbing and cleaning substrate | Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1996-05-21 |
| 5345639 | Device and method for scrubbing and cleaning substrate | Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1994-09-13 |