Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5965200 | Processing apparatus and processing method | Kiyohisa Tateyama, Masafumi Nomura | 1999-10-12 |
| 5887604 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh +3 more | 1999-03-30 |
| 5871584 | Processing apparatus and processing method | Kiyohisa Tateyama, Masafumi Nomura | 1999-02-16 |
| 5782990 | Method for washing objects | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh +3 more | 1998-07-21 |
| 5779796 | Resist processing method and apparatus | Masaaki Murakami, Kenichi Nishioka | 1998-07-14 |
| 5759614 | Resist processing method and apparatus | Masaaki Murakami, Kenichi Nishioka | 1998-06-02 |
| 5671764 | Washing apparatus, and washing method | Shinya Murakami, Yuuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh +3 more | 1997-09-30 |
| 5626913 | Resist processing method and apparatus | Masaaki Murakami, Kenichi Nishioka | 1997-05-06 |
| 5518552 | Method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Tatsuya Iwasaki +1 more | 1996-05-21 |
| 5488964 | Washing apparatus, and washing method | Shinya Murakami, Yuji Kamikawa, Sinichiro Izumi, Noriyuki Anai, Takami Satoh +3 more | 1996-02-06 |
| 5345639 | Device and method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Tatsuya Iwasaki +1 more | 1994-09-13 |