Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6063190 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Masatoshi Deguchi +1 more | 2000-05-16 |
| 5942035 | Solvent and resist spin coating apparatus | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Masatoshi Deguchi +1 more | 1999-08-24 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Yasuhiro Sakamoto, Masami Akimoto, Kiyohisa Tateyama | 1997-05-06 |
| 5518552 | Method for scrubbing and cleaning substrate | Kouichi Tanoue, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1996-05-21 |
| 5345639 | Device and method for scrubbing and cleaning substrate | Kouichi Tanoue, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki +1 more | 1994-09-13 |