Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8741070 | Liquid processing method, liquid processing apparatus and recording medium | Nobutaka Mizutani, Takehiko Orii, Akira Fujita | 2014-06-03 |
| 6872670 | Silylation treatment unit and method | Takayuki Toshima, Masami Yamashita | 2005-03-29 |
| 6713239 | Developing method and developing apparatus | Takayuki Toshima, Yoshio Kimura | 2004-03-30 |
| 6709523 | Silylation treatment unit and method | Takayuki Toshima, Masami Yamashita | 2004-03-23 |
| 6706322 | Film forming apparatus and film forming method | Kiyohisa Tateyama | 2004-03-16 |
| 6682777 | Substrate processing method | — | 2004-01-27 |
| 6635113 | Coating apparatus and coating method | Hideyuki Takamori, Noriyuki Anai, Masafumi Nomura, Kiyohisa Tateyama | 2003-10-21 |
| 6491452 | Developing method and developing apparatus | Nobuo Konishi, Takayuki Toshima | 2002-12-10 |
| 6458208 | Film forming apparatus | Noriyuki Anai, Masaaki Takizawa, Mitsuhiro Sakai | 2002-10-01 |
| 6398429 | Developing method and developing apparatus | Takayuki Toshima, Yoshio Kimura | 2002-06-04 |
| 6361600 | Film forming apparatus and film forming method | Kiyohisa Tateyama | 2002-03-26 |
| 6306455 | Substrate processing method | Hideyuki Takamori, Masafumi Nomura | 2001-10-23 |
| 6238848 | Developing method and developing apparatus | Nobuo Konishi, Takayuki Toshima | 2001-05-29 |
| 6203218 | Substrate processing apparatus and substrate processing method | Mitsuhiro Sakai, Shinobu Tanaka | 2001-03-20 |
| 6165552 | Film forming method | Noriyuki Anai, Masaaki Takizawa, Mitsuhiro Sakai | 2000-12-26 |
| D415776 | Apparatus for manufacturing a semiconductor for a liquid crystal display | Noriyuki Anai, Shinkou Matsumoto | 1999-10-26 |
| D415184 | Apparatus for manufacturing a semiconductor for a liquid crystal display | Noriyuki Anai, Shinkou Matsumoto | 1999-10-12 |
| 5803970 | Method of forming a coating film and coating apparatus | Kiyohisa Tateyama, Kimio Motoda, Kenji Sekiguchi | 1998-09-08 |
| 5695817 | Method of forming a coating film | Kiyohisa Tateyama, Kimio Motoda, Kenji Sekiguchi | 1997-12-09 |
| 5681614 | Hydrophobic treatment method involving delivery of a liquid process agent to a process space | Kouji Harada, Takami Satoh, Noriyuki Anai, Masafumi Nomura | 1997-10-28 |
| 5505781 | Hydrophobic processing apparatus including a liquid delivery system | Kouji Harada, Takami Satoh, Noriyuki Anai, Masafumi Nomura | 1996-04-09 |