Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770149 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi | 2004-08-03 |
| 6458208 | Film forming apparatus | Noriyuki Anai, Tsutae Omori, Masaaki Takizawa | 2002-10-01 |
| 6447608 | Spin coating apparatus | Hideyuki Takamori, Masafumi Nomura | 2002-09-10 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6398879 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +1 more | 2002-06-04 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Tetsuya Sada +1 more | 2002-05-21 |
| 6261007 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Shinobu Tanaka +2 more | 2001-07-17 |
| 6238511 | Method and apparatus for processing substrate | Tetsuya Sada, Tetsu Kawasaki, Takeshi Tsukamoto | 2001-05-29 |
| 6203218 | Substrate processing apparatus and substrate processing method | Tsutae Omori, Shinobu Tanaka | 2001-03-20 |
| 6168665 | Substrate processing apparatus | Kiyohisa Tateyama, Kimio Motoda | 2001-01-02 |
| 6165552 | Film forming method | Noriyuki Anai, Tsutae Omori, Masaaki Takizawa | 2000-12-26 |
| 6159288 | Method and apparatus for cleaning treatment | Fumio Satou, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +3 more | 2000-12-12 |
| 6159541 | Spin coating process | Hideyuki Takamori, Masafumi Nomura | 2000-12-12 |
| 6090205 | Apparatus for processing substrate | Kiyohisa Tateyama | 2000-07-18 |
| 6062240 | Treatment device | Tetsuya Sada, Norio Uchihira, Kiyomitsu Yamaguchi | 2000-05-16 |
| 5945161 | Apparatus and method for supplying process solution to surface of substrate to be processed | Hiroshi Hashimoto, Kiyohisa Tateyama, Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Norio Uchihira +1 more | 1999-08-31 |
| 5853961 | Method of processing substrate and apparatus for processing substrate | Kiyohisa Tateyama | 1998-12-29 |
| 5815762 | Processing apparatus and processing method | Masafumi Nomura, Kazuaki Tsunoda | 1998-09-29 |