Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6889764 | Cooling device and cooling method | Osamu Hirose, Kiyohisa Tateyama | 2005-05-10 |
| 6565656 | Coating processing apparatus | Hiroshi Hashimoto, Yuji Shimomura | 2003-05-20 |
| 6456480 | Processing apparatus and a processing method | Osamu Hirose | 2002-09-24 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +1 more | 2002-05-21 |
| 6238511 | Method and apparatus for processing substrate | Tetsu Kawasaki, Mitsuhiro Sakai, Takeshi Tsukamoto | 2001-05-29 |
| 6216475 | Cooling device and cooling method | Osamu Hirose, Kiyohisa Tateyama | 2001-04-17 |
| 6159288 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +3 more | 2000-12-12 |
| 6129546 | Heat process apparatus and heat process method | — | 2000-10-10 |
| 6062240 | Treatment device | Norio Uchihira, Mitsuhiro Sakai, Kiyomitsu Yamaguchi | 2000-05-16 |
| 6002572 | Processing apparatus and a processing method | Osamu Hirose | 1999-12-14 |
| 5941083 | Cooling device and cooling method | Osamu Hirose, Kiyohisa Tateyama | 1999-08-24 |