Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261378 | Substrate cleaning unit and cleaning method | Hiroshi Hashimoto, Yoshitaka Matsuda, Masaaki Yoshida, Fumio Satou | 2001-07-17 |
| 6062240 | Treatment device | Tetsuya Sada, Mitsuhiro Sakai, Kiyomitsu Yamaguchi | 2000-05-16 |
| 6058544 | Scrubbing apparatus and scrubbing method | Kimio Motoda, Yoshiharu Ota, Kiyohisa Tateyama | 2000-05-09 |
| 5945161 | Apparatus and method for supplying process solution to surface of substrate to be processed | Hiroshi Hashimoto, Kiyohisa Tateyama, Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Mitsuhiro Sakai +1 more | 1999-08-31 |