Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451515 | Substrate treating method | Hideyuki Takamori, Kiyohisa Tateyama, Noriyuki Anai, Yoshitaka Matsuda | 2002-09-17 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6261007 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kiyohisa Tateyama, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2001-07-17 |
| 6087632 | Heat processing device with hot plate and associated reflector | Masaaki Yoshida | 2000-07-11 |
| 5998766 | Apparatus and method for cleaning substrate surface by use of Ozone | Masaaki Yoshida | 1999-12-07 |
| 5695562 | Processing apparatus | — | 1997-12-09 |
| 5518552 | Method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda +1 more | 1996-05-21 |
| 5345639 | Device and method for scrubbing and cleaning substrate | Kouichi Tanoue, Shinzi Kitamura, Noriyuki Anai, Takami Satoh, Takayuki Tomoeda +1 more | 1994-09-13 |