Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427551 | Filter cleaning system and filter cleaning method | Yuki OTSUKA, Hiroshi Komiya | 2025-09-30 |
| 12300518 | Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid | Kazuki Kosai, Hideaki Udou, Seiya Fujimoto, Yudai TAKANAGA, Takahito Nakashoya +2 more | 2025-05-13 |
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Chikara Nobukuni, Keigo Satake | 2020-03-17 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Yasuhiro Takaki, Shinichi Umeno, Koji Tanaka, Takami Satoh | 2020-02-25 |
| 10162371 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Chikara Nobukuni, Keigo Satake | 2018-12-25 |