Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300518 | Substrate processing apparatus and substrate processing method having enhanced configuration of replenishing processing liquid | Kazuki Kosai, Seiya Fujimoto, Yudai TAKANAGA, Takahito Nakashoya, Shogo Fukui +2 more | 2025-05-13 |
| 9865452 | Substrate processing method and substrate processing apparatus | Kotaro Oishi, Keisuke Egashira, Kouzou Tachibana | 2018-01-09 |