Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12070769 | Liquid processing apparatus and liquid processing method | Tomoaki Ojima, Takuya ITAHASHI, Ryoichi Horiguchi, Shota WAKAYAMA | 2024-08-27 |
| 11691172 | Liquid processing apparatus and liquid processing method | Tomoaki Ojima, Takuya ITAHASHI, Ryoichi Horiguchi, Shota WAKAYAMA | 2023-07-04 |
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Kouji Takuma, Keigo Satake, Shinji Sugahara +1 more | 2021-06-22 |
| 10591935 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Keigo Satake, Atsushi Anamoto | 2020-03-17 |
| 10162371 | Substrate liquid processing apparatus and substrate liquid processing method | Yasuhiro Takaki, Hiroshi Komiya, Keigo Satake, Atsushi Anamoto | 2018-12-25 |