Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12070769 | Liquid processing apparatus and liquid processing method | Chikara Nobukuni, Takuya ITAHASHI, Ryoichi Horiguchi, Shota WAKAYAMA | 2024-08-27 |
| 11691172 | Liquid processing apparatus and liquid processing method | Chikara Nobukuni, Takuya ITAHASHI, Ryoichi Horiguchi, Shota WAKAYAMA | 2023-07-04 |
| 10422551 | Substrate liquid processing apparatus, and control method of heater unit | Hisakazu Nakayama | 2019-09-24 |