Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10422551 | Substrate liquid processing apparatus, and control method of heater unit | Tomoaki Ojima | 2019-09-24 |
| 8670656 | Liquid heating unit, liquid processing apparatus including the same, and liquid processing method | Toshihiko Nishida, Kazuyoshi Eshima | 2014-03-11 |
| 7868270 | Temperature control for performing heat process in coating/developing system for resist film | Jun Ookura, Eiichi Sekimoto | 2011-01-11 |
| 7755003 | Temperature control for performing heat process on resist film | Jun Ookura, Eiichi Sekimoto | 2010-07-13 |
| 6654668 | Processing apparatus, processing system, distinguishing method, and detecting method | Koji Harada, Jun Ookura | 2003-11-25 |