Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282719 | Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition | Go Ayabe, Ryo Manabe, Jong Won Yun | 2022-03-22 |
| 11062930 | Substrate processing device and substrate conveying method | — | 2021-07-13 |
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Chikara Nobukuni, Keigo Satake, Shinji Sugahara +1 more | 2021-06-22 |
| 10043692 | Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program | Go Ayabe | 2018-08-07 |
| 8509937 | Processing apparatus and operating method therefor | — | 2013-08-13 |
| 8447422 | Substrate processing apparatus, substrate processing method, and storage medium | Masahiro Yoshida | 2013-05-21 |