Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784057 | Substrate processing apparatus, linked processing system, and substrate processing method | — | 2023-10-10 |
| 11282719 | Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition | Go Ayabe, Kouji Takuma, Ryo Manabe | 2022-03-22 |
| 10381980 | High frequency signal generation apparatus | Jae-Sung Rieh | 2019-08-13 |
| 9692355 | Oscillator for high-frequency signal generation | Jae-Sung Rieh, Nam Hyung Kim | 2017-06-27 |