Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538700 | Substrate processing apparatus and substrate processing method | — | 2022-12-27 |
| 11282719 | Substrate processing apparatus, substrate processing method and recording medium of performing liquid exchange processing according to liquid exchange condition | Kouji Takuma, Ryo Manabe, Jong Won Yun | 2022-03-22 |
| 10668494 | Substrate processing apparatus and substrate processing method | Minoru Tashiro, Kunihiko Fujimoto | 2020-06-02 |
| 10046372 | Liquid processing apparatus | Kazuya Goda, Yoshifumi Amano, Nobuya Yamamoto | 2018-08-14 |
| 10043692 | Substrate processing apparatus, substrate transport method, and computer-readable recording medium with stored substrate transport program | Kouji Takuma | 2018-08-07 |