Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Kouji Takuma, Chikara Nobukuni, Keigo Satake +1 more | 2021-06-22 |
| 8969172 | Method for forming isolation structure | Naoko Nakamoto, Katsuchika Suzuki, Tatsuro Nagahara | 2015-03-03 |