Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866554 | Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same | Toshiya OKAMURA, Tetsuo Okayasu, Thorsten Vom Stein | 2024-01-09 |
| 8969172 | Method for forming isolation structure | Naoko Nakamoto, Shinji Sugahara, Tatsuro Nagahara | 2015-03-03 |