Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11999827 | Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same | Toshiya OKAMURA, Thorsten Vom Stein | 2024-06-04 |
| 11866554 | Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same | Katsuchika Suzuki, Toshiya OKAMURA, Thorsten Vom Stein | 2024-01-09 |
| 10268117 | Top-layer membrane formation composition and method for forming resist pattern using same | Masato Suzuki, Xiaowei Wang, Yusuke Hama, Georg Pawlowski | 2019-04-23 |
| 9810988 | Composition for forming overlay film, and resist pattern formation method employing the same | Xiaowei Wang, Masato Suzuki, Georg Pawlowski | 2017-11-07 |
| 9804493 | Composition for forming topcoat layer and resist pattern formation method employing the same | Hyun-Woo Kim, Cheol-Hong Park, Xiaowei Wang, Georg Pawlowski, Yusuke Hama | 2017-10-31 |
| 9482952 | Composition for forming topcoat layer and resist pattern formation method employing the same | Xiaowei Wang, Georg Pawlowski, Takafumi KINUTA | 2016-11-01 |
| 9448485 | Composition for forming fine resist pattern and pattern forming method using same | Takashi Sekito, Masahiro Ishii | 2016-09-20 |
| 7799513 | Process for preventing development defect and composition for use in the same | Yasushi Akiyama, Yusuke Takano, Kiyohisa Takahashi, Sung-Eun Hong | 2010-09-21 |
| 7745093 | Water soluble resin composition and method for pattern formation using the same | Takeshi Nishibe, Sung-Eun Hong, Yusuke Takano | 2010-06-29 |