Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068150 | Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device | Tatsuro Nagahara, Yuko HORIBA | 2024-08-20 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2024-02-13 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2022-03-01 |
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2021-12-28 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2020-10-06 |
| 10435555 | Void forming composition, semiconductor device provided with voids formed using composition, and method for manufacturing semiconductor device using composition | Shigemasa Nakasugi, Go Noya | 2019-10-08 |
| 9482952 | Composition for forming topcoat layer and resist pattern formation method employing the same | Xiaowei Wang, Tetsuo Okayasu, Georg Pawlowski | 2016-11-01 |