Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8697336 | Composition for forming a developable bottom antireflective coating | Shigemasa Nakasugi, Kazuma Yamamoto, Shinji Miyazaki, Munirathna Padmanaban, Srinivasan Chakrapani | 2014-04-15 |
| 8568955 | Composition for formation of top antireflective film, and pattern formation method using the composition | Go Noya, Katsutoshi Kuramoto, Yusuke Takano | 2013-10-29 |
| 8043792 | Composition for formation of antireflection film and pattern formation method using the same | Katsutoshi Kuramoto, Masakazu Kobayashi | 2011-10-25 |
| 7799513 | Process for preventing development defect and composition for use in the same | Yusuke Takano, Kiyohisa Takahashi, Sung-Eun Hong, Tetsuo Okayasu | 2010-09-21 |
| 7537882 | Anti-reflective coating composition and production method for pattern using the same | Jirou Matsuo, Kiyofumi Takano, Yusuke Takano | 2009-05-26 |
| 7365115 | Composition for antireflection coating and method for forming pattern | Yusuke Takano | 2008-04-29 |