Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8568955 | Composition for formation of top antireflective film, and pattern formation method using the composition | Yasushi Akiyama, Go Noya, Yusuke Takano | 2013-10-29 |
| 8043792 | Composition for formation of antireflection film and pattern formation method using the same | Masakazu Kobayashi, Yasushi Akiyama | 2011-10-25 |