Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Sadamichi MORI, Kouji Takuma, Chikara Nobukuni, Keigo Satake, Shinji Sugahara +1 more | 2021-06-22 |
| 10067514 | Substrate processing apparatus and liquid mixing method | Yasuo Kiyohara, Ikuo Sunaka, Koji Tanaka, Takami Satoh, Kazuyoshi Mizumoto +3 more | 2018-09-04 |
| 9862007 | Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein | Daisuke Saiki, Shogo Mizota, Takashi Yabuta, Jun Nonaka, Tatsuya Nagamatsu +1 more | 2018-01-09 |