Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424459 | Substrate processing apparatus and substrate processing method | Hiroki Sakurai, Yenrui HSU, Shoki MIZUGUCHI, Nobuhiro Ogata, Kazuya Goda +2 more | 2025-09-23 |
| 11626298 | Liquid supply device and liquid supply method | Yusuke Takamatsu, Yasuhiro Takaki, Shogo Fukui | 2023-04-11 |
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Takashi Nagai, Hisashi MORITA, Nobuhiro Ogata, Yusuke Takamatsu +1 more | 2021-10-26 |
| 10714365 | Liquid processing apparatus | Tetsurou Iriyama, Yasuhiro Takaki, Takami Satoh | 2020-07-14 |
| 10573539 | Substrate liquid processing apparatus | Hiroshi Komiya, Yasuhiro Takaki, Koji Tanaka, Takami Satoh, Atsushi Anamoto | 2020-02-25 |