Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424459 | Substrate processing apparatus and substrate processing method | Hiroki Sakurai, Shoki MIZUGUCHI, Nobuhiro Ogata, Shinichi Umeno, Kazuya Goda +2 more | 2025-09-23 |
| 12007692 | Nozzle, substrate processing apparatus, and substrate processing method | Hiroki Sakurai, Nobuhiro Ogata, Daisuke Goto, Kanta Mori, Kenji Yada +2 more | 2024-06-11 |