Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955352 | Substrate processing apparatus | Hiroki Sakurai, Daisuke Goto, Takashi Nakazawa, Yusuke Hashimoto | 2024-04-09 |
| 11798819 | Liquid processing apparatus and liquid processing method | Kazuki Kosai, Taisei Inoue | 2023-10-24 |
| 11626298 | Liquid supply device and liquid supply method | Yasuhiro Takaki, Shinichi Umeno, Shogo Fukui | 2023-04-11 |
| 11158525 | Substrate processing apparatus and substrate processing method | Yasuhiro Takaki, Shinichi Umeno, Takashi Nagai, Hisashi MORITA, Nobuhiro Ogata +1 more | 2021-10-26 |