Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802848 | pH measuring device and pH measuring method | — | 2023-10-31 |
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Hisashi Kawano, Seigo Fujitsu, Hideaki Sato +3 more | 2022-08-23 |
| 11309194 | Substrate liquid treatment apparatus | Koji Tanaka, Koji Yamashita, Hiroyuki Masutomi, Hitoshi Kosugi, Takao Inada +2 more | 2022-04-19 |
| 10483137 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hiroyuki Masutomi, Koji Tanaka, Takami Satoh | 2019-11-19 |
| 9887092 | Etching method, etching apparatus, and storage medium | Takahiro Furukawa, Yusuke Futamata, Hideaki Sato, Hiromi Hara, Takahiro Kawazu +1 more | 2018-02-06 |
| 9070549 | Substrate processing apparatus and substrate processing method | Hiroshi Tanaka, Takao Inada | 2015-06-30 |