Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594430 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Takafumi Tsuchiya, Yuki Ishii, Hiroyuki Masutomi | 2023-02-28 |
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Hisashi Kawano, Hideaki Sato, Teruaki Konishi +3 more | 2022-08-23 |