Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11615971 | Substrate processing apparatus and processing liquid concentration method | Kouzou Kanagawa, Osamu Kuroda, Koji Tanaka, Kotaro Tsurusaki, Hidemasa Aratake +2 more | 2023-03-28 |
| 11424141 | Substrate processing apparatus, substrate processing method and recording medium | Jian Zhang, Takao Inada, Hisashi Kawano, Seigo Fujitsu, Hideaki Sato +3 more | 2022-08-23 |
| 11152234 | Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium | Kazusige Sano, Koji Tanaka | 2021-10-19 |
| 9355875 | Liquid processing apparatus | Takahiro Tetsuka | 2016-05-31 |
| 6340330 | Game machine and information storage medium | Masuya Oishi, Hiroaki Yotoriyama, Tadashi Iguchi | 2002-01-22 |