Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152234 | Weighing apparatus, substrate liquid processing apparatus, weighing method, substrate liquid processing method and recording medium | Teruaki Konishi, Koji Tanaka | 2021-10-19 |
| 10840081 | Liquid processing apparatus, liquid processing method, and storage medium | Takumi Honda, Hironobu Hyakutake | 2020-11-17 |