Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9452452 | Liquid processing apparatus | — | 2016-09-27 |
| 9305818 | Substrate processing apparatus | Yuji Kamikawa, Takafumi Tsuchiya | 2016-04-05 |
| 9272310 | Liquid processing apparatus | — | 2016-03-01 |
| 8851819 | Substrate processing apparatus | Yuji Kamikawa, Takafumi Tsuchiya | 2014-10-07 |
| 8567417 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Yuji Kamikawa, Hiroaki Inadomi, Hideyuki Yamamoto, Hiroshi Komiya | 2013-10-29 |
| 8002511 | Batch forming apparatus, substrate processing system, batch forming method, and storage medium | Yuji Kamikawa | 2011-08-23 |
| 7412981 | Liquid processing apparatus and method | Yuji Kamikawa | 2008-08-19 |
| 7347214 | Rotary shaft sealing mechanism and liquid processing apparatus | Yuji Kamikawa, Masaki Taira | 2008-03-25 |
| 7314054 | Liquid processing apparatus with nozzle having planar ejecting orifices | Yuji Kamikawa | 2008-01-01 |
| 7240680 | Substrate processing apparatus | — | 2007-07-10 |
| 6743297 | Rotary substrate processing apparatus and method | Sadayuki Fujishima, Yuji Kamikawa | 2004-06-01 |
| 6725868 | Liquid processing apparatus | Yuji Kamikawa | 2004-04-27 |
| 6698439 | Processing apparatus with sealing mechanism | Yuji Kamikawa | 2004-03-02 |
| 6663721 | Liquid processing apparatus and method | Koji Tanaka | 2003-12-16 |
| 6568412 | Rotary processing apparatus with holding bars having drain grooves | — | 2003-05-27 |
| 5106564 | Method of and apparatus for making fiber-reinforced polymer compositions | Kunio Iwanami, Kissho Kitano, Kiyotada Narukawa, Kenichi Aoki, Yukihiko Yagi +5 more | 1992-04-21 |
| 5106893 | Fiber-reinforced polymer composition | Kunio Iwanami, Kissho Kitano, Kiyotada Narukawa, Masato Sakuma, Takashi Mikami +3 more | 1992-04-21 |
| 4990550 | Fiber-reinforced polymer composition and method of producing same | Kunio Iwanami, Kissho Kitano, Kiyotada Narukawa, Kenichi Aoki, Yukihiko Yagi +5 more | 1991-02-05 |