Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092496 | Temperature sensor and manufacturing method of temperature sensor | Yuuki Sato, Kazuaki Yano | 2021-08-17 |
| 9117854 | Substrate processing apparatus, substrate processing method, and storage medium storing a computer program for performing substrate processing method | — | 2015-08-25 |
| 7608163 | Substrate processing apparatus and method | — | 2009-10-27 |
| 7347214 | Rotary shaft sealing mechanism and liquid processing apparatus | Koji Egashira, Yuji Kamikawa | 2008-03-25 |