Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322606 | Substrate processing apparatus and substrate processing method | Shota Umezaki | 2025-06-03 |
| 12283495 | Substrate processing apparatus and substrate processing method | Mikio Nakashima, Shota Umezaki | 2025-04-22 |
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Shota Umezaki, Suguru Enokida, Kouji Kimoto | 2025-03-18 |
| 12057326 | Substrate processing apparatus and substrate processing method | Shota Umezaki | 2024-08-06 |
| 11735439 | Substrate processing system and method for supplying processing fluid | Yasuo Kiyohara, Satoshi Okamura | 2023-08-22 |
| 11688613 | Substrate processing apparatus and substrate processing method | Shota Umezaki | 2023-06-27 |
| 11482427 | Substrate processing system and method for supplying processing fluid | Yasuo Kiyohara, Satoshi Okamura | 2022-10-25 |
| 11295965 | Cleaning apparatus and cleaning method of substrate processing apparatus | Kohei Yamada, Satoshi Biwa | 2022-04-05 |
| 11139181 | Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block | Tooru Nakamura, Kouji Kimoto, Yoshihisa Aoyama | 2021-10-05 |
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira +6 more | 2020-12-15 |
| 10679845 | Substrate processing apparatus having cooling member | Satoshi Okamura, Satoshi Biwa | 2020-06-09 |
| 10593571 | Substrate processing apparatus | Tooru Nakamura, Kouji Kimoto, Yasuo Kiyohara, Satoshi Okamura, Satoshi Biwa +4 more | 2020-03-17 |
| 10207349 | High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2019-02-19 |
| 9496158 | Processing apparatus | Mikio Nakashima, Satoshi Okamura | 2016-11-15 |
| 9449857 | Substrate processing apparatus and substrate processing method | — | 2016-09-20 |
| 8814563 | Substrate heating apparatus and method and coating and developing system | Shinichi Hayashi | 2014-08-26 |
| 8567417 | Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method | Yuji Kamikawa, Hideyuki Yamamoto, Hiroshi Komiya, Koji Egashira | 2013-10-29 |
| 8237092 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuo Fukuoka, Tetsuya Oda | 2012-08-07 |
| 8080765 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuo Fukuoka, Tetsuya Oda | 2011-12-20 |
| 7812285 | Apparatus and method for heating substrate and coating and developing system | Shinichi Hayashi, Tetsuo Fukuoka, Tetsuya Oda | 2010-10-12 |
| 7780438 | Substrate heating apparatus and method and coating and developing system | Shinichi Hayashi | 2010-08-24 |
| 7758340 | Heating device and heating method | Masami Akimoto, Shinichi Hayashi, Naruaki Iida | 2010-07-20 |