Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322606 | Substrate processing apparatus and substrate processing method | Hiroaki Inadomi | 2025-06-03 |
| 12283495 | Substrate processing apparatus and substrate processing method | Mikio Nakashima, Hiroaki Inadomi | 2025-04-22 |
| 12255081 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Hiroaki Inadomi, Suguru Enokida, Kouji Kimoto | 2025-03-18 |
| 12057326 | Substrate processing apparatus and substrate processing method | Hiroaki Inadomi | 2024-08-06 |
| 11742232 | Substrate processing method and substrate processing apparatus | Yoshinori Ikeda, Shigeru MORIYAMA, Ryo Yamamoto, Takashi Uno | 2023-08-29 |
| 11688613 | Substrate processing apparatus and substrate processing method | Hiroaki Inadomi | 2023-06-27 |
| 11373883 | Substrate processing apparatus, substrate processing system and substrate processing method | Yoshinori Ikeda | 2022-06-28 |
| 11217451 | Substrate processing method and substrate processing apparatus | Hitoshi Kosugi, Kouzou Tachibana, Ryo Yamamoto | 2022-01-04 |
| 10892176 | Substrate processing apparatus having top plate with through hole and substrate processing method | Yoshinori Ikeda, Kenji Nishi | 2021-01-12 |