Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322631 | Substrate processing system, substrate processing method, and recording medium | Takafumi Tsuchiya, Hiromi Hara, Shuhei Goto | 2025-06-03 |
| 8909364 | Substrate processing system and substrate processing method | Yuichi Yamamoto | 2014-12-09 |
| 8731701 | Substrate treatment method and substrate treatment system | Yuichi Yamamoto | 2014-05-20 |
| 8369977 | Coating and developing apparatus | — | 2013-02-05 |
| 8219233 | Substrate treatment apparatus | — | 2012-07-10 |
| 8043039 | Substrate treatment apparatus | Yuichi Yamamoto, Akihiro Teramoto | 2011-10-25 |