Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10928732 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hironobu Hyakutake, Takafumi Tsuchiya | 2021-02-23 |
| 10458010 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Hironobu Hyakutake, Takafumi Tsuchiya | 2019-10-29 |