Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8550875 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroaki Nishida, Hiroyuki Kaneko, Misao Date, Takashi Mitsuya, Takamasa Nakamura | 2013-10-08 |
| 8202139 | Method of operating substrate processing apparatus and substrate processing apparatus | Hiroaki Nishida, Hiroyuki Kaneko, Misao Date, Takashi Mitsuya, Takamasa Nakamura | 2012-06-19 |
| 8118640 | Wafer transferring apparatus, polishing apparatus, and wafer receiving method | Nobuyuki Takahashi, Tadakazu Sone, Takuji Kobayashi | 2012-02-21 |
| 7942725 | Polishing apparatus | Takuji Hayama, Tetsuya Yashima | 2011-05-17 |
| 7645185 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Daisuke Koga, Satoshi Wakabayashi | 2010-01-12 |
| 7445543 | Polishing apparatus | Takuji Hayama, Tetsuya Yashima | 2008-11-04 |
| 7160180 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Daisuke Koga, Satoshi Wakabayashi | 2007-01-09 |
| 7083506 | Polishing apparatus | Hideo Aizawa, Soichi Isobe | 2006-08-01 |
| 7063598 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Daisuke Koga, Satoshi Wakabayashi | 2006-06-20 |
| 6783445 | Polishing apparatus | Hideo Aizawa, Soichi Isobe | 2004-08-31 |
| 6746312 | Polishing method and polishing apparatus | Hiroshi Kojima, Suguru Ogura, Soichi Isobe | 2004-06-08 |