Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416082 | Processing method and substrate processing system | — | 2025-09-16 |
| 11549179 | Film forming method | Yuka GOTO, Daisuke Hojo | 2023-01-10 |
| 11248296 | Source gas supply apparatus, film forming apparatus, and source gas supply method | — | 2022-02-15 |
| 10783264 | Non-transitory computer-readable storage medium, and information processing device using unique file-specific information for decryption of a target file | Takanori Hamano, Seiji Kurimoto, Yumiko Yamagata, Yoko Miura, Yoshimi Yufu +1 more | 2020-09-22 |
| 10242878 | Substrate processing method and recording medium | Tomonari Urano, Kyohei NOGUCHI, Osamu Yokoyama, Takashi Kobayashi, Takashi Sakuma | 2019-03-26 |
| 9620370 | Method of forming Ti film | Seishi Murakami, Takaya Shimizu | 2017-04-11 |
| 9349642 | Method of forming contact layer | Seishi Murakami, Takaya Shimizu | 2016-05-24 |
| 8263181 | Ti-based film forming method and storage medium | Kensaku Narushima, Takamitsu TAKAYAMA | 2012-09-11 |
| 8257790 | Ti-containing film formation method and storage medium | Kensaku Narushima, Kunihiro Tada | 2012-09-04 |
| D660398 | Fish hook | — | 2012-05-22 |
| 7981794 | Film forming method and substrate processing apparatus | Kensaku Narushima, Fumitaka Amano | 2011-07-19 |
| 7906442 | Gas treatment method and computer readable storage medium | Kensaku Narushima | 2011-03-15 |
| 7850817 | Polishing device and substrate processing device | Tetsuji Togawa, Ryuichi Kosuge, Koji Ato, Hiroshi Sotozaki | 2010-12-14 |
| 7737005 | Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program | Kunihiro Tada, Kensaku Narushima | 2010-06-15 |
| 7645185 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Hiroomi Torii, Daisuke Koga | 2010-01-12 |
| 7632378 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Kenichiro Saito, Masahiko Sekimoto +2 more | 2009-12-15 |
| 7514120 | Precoat film forming method | Toshio Hasegawa | 2009-04-07 |
| 7160180 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Hiroomi Torii, Daisuke Koga | 2007-01-09 |
| 7063598 | Substrate delivery mechanism | Soichi Isobe, Hideo Aizawa, Hiroomi Torii, Daisuke Koga | 2006-06-20 |
| 6916231 | Polishing apparatus | — | 2005-07-12 |
| 6878044 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6682408 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Kenichiro Saito, Masahiko Sekimoto +2 more | 2004-01-27 |
| 6609962 | Dressing apparatus and polishing apparatus | Kuniaki Yamaguchi, Tetsuji Togawa, Nobuyuki Takada, Osamu Nabeya | 2003-08-26 |
| 6602119 | Dressing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Nobuyuki Takada | 2003-08-05 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Kunihiko Sakurai, Tetsuji Togawa | 2003-06-17 |